BAHAN | TEKNOLOGI PENYEMPAN | KEPADAT g/cm3 | Sp3% | KEKERASAN GPa | KOEFISIEN GESERAN |
BERLIAN | SEMULAJADI | 3.52 | 100 | 100 | 0.02~0.10 |
a-C | MENGELUARKAN | 1.9~2.4 | 25 | 11~24 | 0.10~0.15 |
a-C:H:M | PEREMPUAN REAKTIF | 1.9~2.4 |
| 10~20 | 0.10~0.20 |
a-C:H | RF SPUTTERING | 1.57~1.70 |
| 16~40 | 0.02~0.47 |
a-C,a-C:H | RALU ION | 1.8~3.5 |
| 32~75 | 0.06~0.19 |
ta-C | PENAPIS MAGNET | 2.8~3.0 | 85~95 | 40~80 | 0.04~0.14 |
Ta-C | PLD | 2.4 | 85~95 | 40~80 | 0.03~0.15 |
NAMI DIAMOND | PLD | 2.9~3.5 | 75 | 80~100 |
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